Introduction to MEMS and NEMS Devices

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Overview

Learning outcomes

Course content

Fundamentals of MEMS and NEMS

Fabrication Techniques for Micro and Nano Devices

Mechanical Properties of MEMS/NEMS Materials

Sensing and Actuation Principles

Applications and Future Trends in MEMS/NEMS Technologies

Course fee

Course Fee: USD $100

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Introduction to MEMS and NEMS Devices

Overview

Learning outcomes

Course content

Fundamentals of MEMS and NEMS

Fabrication Techniques for Micro and Nano Devices

Mechanical Properties of MEMS/NEMS Materials

Sensing and Actuation Principles

Applications and Future Trends in MEMS/NEMS Technologies

Course fee

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